发明名称 |
TiO2-CONTAINING QUARTZ-GLASS SUBSTRATE FOR AN IMPRINT MOLD AND MANUFACTURING METHOD THEREFOR |
摘要 |
The present invention relates to a TiO2-containing quartz glass substrate for an imprint mold having a main surface and a side surface, in which the side surface has an arithmetic average roughness (Ra) of 1 nm or less, and the side surface has a root mean square (MSFR_rms) of concaves and convexes in the wavelength region of from 10 μm to 1 mm being 10 nm or less. |
申请公布号 |
US2015097304(A1) |
申请公布日期 |
2015.04.09 |
申请号 |
US201414570340 |
申请日期 |
2014.12.15 |
申请人 |
Asahi Glass Company, Limited |
发明人 |
KOIKE Akio;Miyasaka Junko;Nakanishi Hiroshi |
分类号 |
B29D11/00;B29C59/00;B29C59/02 |
主分类号 |
B29D11/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
Chiyoda-ku JP |