| 摘要 |
The present invention relates to a nozzle tip injecting cleaning water toward a substrate surface in a substrate washing process. The nozzle tip coupled to a nozzle header to inject the cleaning water toward a substrate in the substrate washing process includes a flange with an internal cavity and a pipe on which a discharge slit is formed on the front end to be connected to the cavity of the flange. A fitting protrusion and a fitting hole are formed on each of the nozzle header and flange. At least one fitting protrusion and fitting hole can be formed. |
