| 摘要 |
PROBLEM TO BE SOLVED: To prevent the occurrence of a scratch by pollution such as a polishing liquid stuck to a top ring, by efficiently cleaning a seal member for blocking up a clearance caused between a freely expandable connection sheet, a top ring body and a retainer ring with wash water, for blocking up the clearance caused inside the retainer ring vertically movably provided in an outer peripheral surface of the top ring body.SOLUTION: A polishing device comprises a polishing table having a polishing surface, a retainer ring guide 410 fixed to the top ring body 2, and a freely expandable connection sheet 420 guided by the retainer ring guide 410 and blocking up the clearance between a ring member 408 of a vertically moving retainer ring 3 and itself, and comprises a top ring for holding a substrate and pressing it to the polishing surface, and a connection sheet cleaning nozzle 500 for cleaning a connection sheet 420 by directly applying a water flow by injecting the wash water in the horizontal direction toward the connection sheet 420. |
