发明名称 PATTERN FORMING METHOD AND MOLD RELEASE DEVICE
摘要 PROBLEM TO BE SOLVED: To release a mold while preventing the expansion and contraction, and deformation of a material to be transferred and surely forming a transfer pattern.SOLUTION: A mold release device 1, which is a device for releasing an imprint mold 30 from a material to be transferred 20 against which the imprint mold 30 is pressed, includes: a peeling guide plate 10 that is wider than the material to be transferred 20 and stuck to the rear surface 23 on the opposite side of a transfer pattern forming side surface 22 of the material to be transferred 20; and driving means 40 that moves both ends 11 of the peeling guide plate 10 in a direction of releasing the material to be transferred 20 from the imprint mold 30. The driving means 40 comprises a cylinder driving device 42, a pulley part 43, and a wire 41 whose tips are mounted to both ends 11 of the peeling guide plate 10 through jigs 12.
申请公布号 JP2015063025(A) 申请公布日期 2015.04.09
申请号 JP20130196964 申请日期 2013.09.24
申请人 FUJIKURA LTD 发明人 HATA KEIICHIRO;TSUKIJI YASUHIKO
分类号 B29C59/02;H01L21/027 主分类号 B29C59/02
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