发明名称 METHOD FOR MANUFACTURING FILM WITH PATTERN SHAPE, METHOD FOR MANUFACTURING OPTICAL COMPONENT, METHOD FOR MANUFACTURING CIRCUIT BOARD, AND METHOD FOR MANUFACTURING ELECTRONIC APPARATUS
摘要 PROBLEM TO BE SOLVED: To provide: a method for manufacturing a film with a pattern shape, in which alignment marks of a mold and a substrate can be highly accurately detected with a simplified method and high throughput properties are obtained; a method for manufacturing an optical component; a method for manufacturing a circuit board; and a method for manufacturing an electronic apparatus.SOLUTION: In a method for manufacturing a film with a pattern shape by optical nanoimprinting, gas satisfying the following expression (1) is used. |n-n|≤|n-n| (1) (in the expression (1), nrepresents the refractive index of a photocurable composition R at a wavelength of light (a), nrepresents the refractive index of a photocurable composition R' at a wavelength of the light (a), the gas being dissolved in the photocurable composition R', and nrepresents the refractive index of a mold at a wavelength of the light (a).)
申请公布号 JP2015065308(A) 申请公布日期 2015.04.09
申请号 JP20130198446 申请日期 2013.09.25
申请人 CANON INC 发明人 ITO TOSHIKI;ISHIDA SHINGO;KAWASAKI YOJI;SAKAI KEITA
分类号 H01L21/027;B29C59/02 主分类号 H01L21/027
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