CHARGED PARTICLE BEAM DEVICE AND METHOD FOR SETTING CORRECTION FILTER THEREOF

摘要

The same region of a sample is scanned with a charged particle beam at a first speed within a bandwidth range of a detection unit and a second speed which exceeds the upper bound of the bandwidth. A first amplitude spectrum which is obtained by frequency analyzing a first detection signal which is obtained by the scanning at the first speed is superpositioned with a first amplitude spectrum which is obtained in a different image capture condition. A degraded function which represents a frequency characteristic of the detection unit is computed using the superpositioned first spectrum and a second spectrum corresponding to a second detection signal. While the superpositioned frequency spectrum does not satisfy an amplitude condition, the image capture condition is changed and the process is returned to a first processing unit. If the superpositioned frequency spectrum satisfies the amplitude condition, a correction filter of the detection unit of a charged particle beam device is computed and set on the basis of an inverse function of the already computed degraded function.