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发明名称
AN ENCODERHEAD SYSTEM, A POSITIONING SYSTEM AND A LITHOGRAPHIC APPARATUS.
摘要
申请公布号
NL2013507(A)
申请公布日期
2015.04.09
申请号
NL20142013507
申请日期
2014.09.22
申请人
ASML NETHERLANDS B.V.
发明人
PASCH ENGELBERTUS ANTONIUS FRANSISCUS;EUSSEN EMIEL JOZEF MELANIE;JEUNINK ANDRE BERNARDUS
分类号
G01D5/38;G03F7/20
主分类号
G01D5/38
代理机构
代理人
主权项
地址
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