发明名称 |
IMPRINT MOLD BASE PLATE, IMPRINT MOLD AND MANUFACTURING METHOD OF THESE, AND IMPRINT MOLD REGENERATION PROCESS |
摘要 |
<p>PROBLEM TO BE SOLVED: To provide an imprint mold base plate and an imprint mold, having a concavity of desired precision and being partially reusable, and also to provide a manufacturing method of these imprint mold base plate and imprint mold, and a method for regenerating the imprint mold.SOLUTION: An imprint mold base plate 1 includes: a thin plate part 2 having a principal plane 2A on which a fine uneven pattern is formable; a support part 3 of a hollow cylindrical shape, supporting a counter surface 2B countering the principal plane 2A of the thin plate part 2; and a joint part 4 interposed between and connecting the thin plate part 2 and the support part 3. The thin plate part 2 is connected to the support part 3 via the joint part 4 such that one opening end 31 of the support part 3 of a hollow cylindrical shape is closed by the counter surface 2B. The joint part 4 is configured such that the thin plate part 2 and the support part 3 are separable.</p> |
申请公布号 |
JP2015063065(A) |
申请公布日期 |
2015.04.09 |
申请号 |
JP20130198076 |
申请日期 |
2013.09.25 |
申请人 |
DAINIPPON PRINTING CO LTD |
发明人 |
ARITSUKA YUKI;SAKAMOTO TAKESHI |
分类号 |
B29C33/38;B29C59/02;H01L21/027 |
主分类号 |
B29C33/38 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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