CHEMICAL LIQUID CONTAINER REPLACEMENT DEVICE, CONTAINER MOUNTING MODULE, CHEMICAL LIQUID CONTAINER REPLACEMENT METHOD, AND SUBSTRATE PROCESSING APPARATUS

摘要

In a chemical liquid container replacement device D2 configured to replace a chemical liquid container 50, multiple chemical liquid containers 50 respectively connected to base end sides of chemical liquid supply paths configured to supply chemical liquids, and a nozzle attachment/detachment device 61 is configured to attach/detach the base end side of the chemical liquid supply path with respect to the chemical liquid container 50 of a container arrangement section 60. A loading/unloading port 62 loads a new chemical liquid container 50 for performing a liquid process on a substrate W and unloads a completely used chemical liquid container 50. A container transfer device 7 unloads the completely used chemical liquid container 50 from the container arrangement section 60 toward the loading/unloading port 62 and loads the new chemical liquid containers 50 from the loading/unloading port 62 toward the container arrangement section 60.

主权项

1. A chemical liquid container replacement device comprising:
a container arrangement section in which multiple chemical liquid containers respectively connected with base end sides of chemical liquid supply paths are arranged; an attachment/detachment device configured to attach and detach the base end side of the chemical liquid supply path with respect to the chemical liquid container arranged in the container arrangement section; a loading/unloading port through which a new chemical liquid container storing therein a chemical liquid to perform a liquid process on a substrate is loaded and a completely used chemical liquid container is unloaded; and a container transfer device configured to unloaded the completely used chemical liquid container from the container arrangement section through the loading/unloading port and load the new chemical liquid container into the container arrangement section through the loading/unloading port.