Procédé pour réduire la tendance à la cassure d'une pièce en nitrure de silicium

摘要

Silicon nitride bodies are subjected to Li2O vapour, e.g for 3 to 200 hours at 500-1500 DEG C., to improve their resistance to thermal shocks. The Li2O may be obtained by heating LiOH, a 2% solution of which may be absorbed in a porous alumina brick located close to the silicon nitride body to be treated. The surface of the treated body can be etched away with HF.