| 摘要 |
PROBLEM TO BE SOLVED: To provide a substrate processing device which can achieve high throughput.SOLUTION: A substrate processing device of the present embodiment comprises: a detector for detecting a failure of primary cleaning modules 201A, 201B and secondary cleaning modules 202A, 202B; and a control part 5 for selecting when the detector detects a failure of any among the primary cleaning modules and the secondary cleaning modules, a cleaning line which avoids the damaged cleaning module and performs switching to the selected cleaning line. When any of the plurality of primary cleaning modules is cleaning a substrate or is damaged, the control part 5 controls a first transfer robot 209 to transfer the substrate to the primary cleaning module of the plurality of primary cleaning modules, which is not cleaning the substrate or which is not damaged. |
