| 发明名称 |
SUBSTRATE TRANSFER CHAMBER AND CONTAINER CONNECTING MECHANISM |
| 摘要 |
A substrate transfer chamber for unloading the substrates from the containers includes a housing-shaped main body and a plurality of container connecting mechanisms to which the containers are connected. In the main body, some of the container connecting mechanisms are arranged on top of one another in a height direction of the main body. |
| 申请公布号 |
US2015098788(A1) |
申请公布日期 |
2015.04.09 |
| 申请号 |
US201414507724 |
申请日期 |
2014.10.06 |
| 申请人 |
Tokyo Electron Limited |
发明人 |
WAKABAYASHI Shinji;KONDOH Keisuke;KOBAYASHI Sensho |
| 分类号 |
B65G65/00 |
主分类号 |
B65G65/00 |
| 代理机构 |
|
代理人 |
|
| 主权项 |
1. A substrate transfer chamber, to which a plurality of containers accommodating substrates is connected, for unloading the substrates from the containers, comprising:
a housing-shaped main body; and a plurality of container connecting mechanisms to which the containers are connected, wherein, in the main body, some of the container connecting mechanisms are arranged on top of one another in a height direction of the main body. |
| 地址 |
Tokyo JP |
