POWER MINIMIZING CONTROLLER FOR A STAGE ASSEMBLY

摘要

A method for moving a stage includes coupling a stage mover to the stage, and directing current to the stage mover with a control system. The stage mover includes a magnet array and a conductor array positioned adjacent to the magnet array. The conductor array includes a first layer of coils and a second layer of coils, with the first layer of coils being closer to the magnet array than the second layer of coils. The control system directs current to the first layer of coils and the second layer of coils independently. Further, the control system directs more current to the first layer of coils than the second layer of coils during a movement step to reduce the power consumption.

主权项

1. A method for moving a workpiece a movement step, the method comprising the steps of:
coupling a stage mover to the workpiece, the stage mover including a magnet array and a conductor array positioned adjacent to the magnet array, the conductor array including a first layer of conductors and a second layer of conductors, wherein the first layer of conductors is closer to the magnet array than the second layer of conductors; and directing current to the first layer of conductors and the second layer of conductors independently with a control system, wherein the control system simultaneously directs a first current to the first layer of conductors and a second current to the second layer of conductors, and wherein the first current is greater than the second current during the movement step.