| 摘要 |
Switchable micromachined transducer arrays are described where one or more switches, or relays, are monolithically integrated with transducer elements in a piezoelectric micromachined transducer array (pMUT). In embodiments, a MEMS switch is implemented on the same substrate as the transducer array for switching operational modes of the transducer array. In embodiments, a plurality of transducers are interconnected in parallel through MEMS switch(es) in a first operational mode (e.g., a drive mode) during a first time period, and are then interconnected through the MEMS switch(es) with at least some of the transducers in series in a second operational mode (e.g., a sense mode) during a second time period. |
