发明名称 ALIGNER AND WAFER SORTER USING THE SAME
摘要 <p>Disclosed are an aligner and a wafer sorting device using the same. The disclosed aligner comprises: a body forming the appearance of the aligner; an alignment unit installed on the body to rotate or horizontally move a wafer; a displacement detection unit measuring the horizontal displacement of the wafer in accordance with the rotation of the wafer and a notch part formed on the wafer; and a checking unit checking the mounting state of the wafer mounted on the alignment unit. The alignment unit rotates or horizontally moves the wafer in accordance with the position of the notch part and the displacement corresponding to the rotational angle of the wafer in order for the wafer to be regularly placed on a predetermined position.</p>
申请公布号 KR101510224(B1) 申请公布日期 2015.04.09
申请号 KR20140001847 申请日期 2014.01.07
申请人 发明人
分类号 H01L21/677;H01L21/68 主分类号 H01L21/677
代理机构 代理人
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