| 摘要 |
PROBLEM TO BE SOLVED: To provide a technique capable of cooling an optical instrument mounted on a substrate processing apparatus with a simple constitution.SOLUTION: A substrate processing apparatus comprises: a housing 10; a holding part 3 holding a substrate W in an internal space of the housing 10; an air flow formation part 7 for forming an air flow in the internal space; a housing box 16 disposed in the internal space; and an optical instrument 5 which is housed in the housing box 16 and used for processing the substrate. A wall 161 on the upstream side of the air flow in the housing box 16 has a ventilation structure allowing wind to pass therethrough. |
