发明名称 PHOTOSENSITIVE RESIN COMPOSITION, METHOD FOR PRODUCING CURED RELIEF PATTERN, AND SEMICONDUCTOR DEVICE
摘要 PROBLEM TO BE SOLVED: To provide a photosensitive resin composition which can be cured at a low temperature and gives a cured film achieving all of high sensitivity, high elongation, and good storage stability, a method for producing a cured relief pattern which forms a pattern using the photosensitive resin composition, and a semiconductor device and a display device having the cured relief pattern.SOLUTION: The photosensitive resin composition contains a phenol resin (A), a photoacid generator (B), a crosslinking agent (C), a C3-C30 solvent (D) represented by general formula (1) {where Ris a C2-C29 divalent or trivalent organic group, Ris a hydrogen atom or a monovalent or divalent organic group, and Rand Rmay be linked together to form a ring structure}, and a solvent (E) different from the solvent (D). The mass content of the solvent (D) is less than that of the solvent (E).
申请公布号 JP2015064484(A) 申请公布日期 2015.04.09
申请号 JP20130198351 申请日期 2013.09.25
申请人 ASAHI KASEI E-MATERIALS CORP 发明人 INOUE YASUHEI;HIRATA TATSUYA
分类号 G03F7/004;C08L61/06;G03F7/023;G03F7/038;G03F7/40 主分类号 G03F7/004
代理机构 代理人
主权项
地址