MULTIPLE ZONE COIL ANTENNA WITH PLURAL RADIAL LOBES
摘要
<p>A low inductance coil antenna for a plasma reactor has multiple radial zones of plural conductor lobes extending radially from respective RF supply and ground rings.</p>
申请公布号
WO2015050782(A1)
申请公布日期
2015.04.09
申请号
WO2014US57635
申请日期
2014.09.26
申请人
APPLIED MATERIALS, INC.
发明人
KNYAZIK, VLADIMIR;BANNA, SAMER;TANTIWONG, KYLE, R.
