发明名称 振動子の作製方法、振動子作製用マスク、および振動子用パッケージ
摘要 A method of fabricating a crystal unit fills an adhesive from a first opening in a front surface of a mask of each of penetration holes in the mask in a state in which the mask is set on a base, into each penetration hole, and heats, by a heating element, a sidewall region defining a second opening in a back surface of the mask, in order to cure a sidewall part of the adhesive in the sidewall region defining each penetration hole in contact with the adhesive filling each penetration hole. A crystal blank is bonded on the base using the adhesive in order to form the crystal unit, after removing the mask from the base.
申请公布号 JP5699498(B2) 申请公布日期 2015.04.08
申请号 JP20100204054 申请日期 2010.09.13
申请人 发明人
分类号 H03H3/02;H01L21/52;H01L23/08;H03H9/02;H03H9/10 主分类号 H03H3/02
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