| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a multilayer film coil in which there is no through-hole and a bulk-shaped magnetic core is available, without using a photolithography step. <P>SOLUTION: A multilayer film coil is formed in a helical shape by alternately layering a pattern of a conductive film and a pattern of an insulating film on a substrate and connecting the patterns of the conductive films with each other. When a circumferential length for one round around an axis of the helical shape is defined as P, the pattern of the conductive film and the pattern of the insulating film have determined circumferential lengths Lc and Li shorter than P. The pattern of the conductive film or the insulating film is formed right above the substrate. Regarding the same direction around the axis of the helical shape, an end point starting the pattern of the insulating film is matched to a position advanced from an end point starting the pattern of the conductive film right below the end point starting the pattern of the insulating film by a circumferential length P-Li, the end point starting the pattern of the conductive film is matched to a position advanced from the end point starting the pattern of the insulating film right below the end point starting the pattern of the conductive film by a circumferential length P-Lc, and the patterns are layered, respectively. <P>COPYRIGHT: (C)2012,JPO&INPIT</p> |
