| 摘要 |
<p>An optical displacement measurement device in which variations in interference light by stray light are suppressed to improve interpolation accuracy and detection accuracy. The surface of diffraction grating 11 is coated with protective layer 12 of thickness L and refractive index n. The protective layer has thickness L such that, with angleθbetween a line normal to the protective layer and an incident light beam and an angleθ′between diffracted light generated by diffraction grating and reflected by boundary surface of protective layer to become stray light to be re-incident on diffraction grating and a line normal to diffraction grating, interference light is of an intensity of interference such that an optical path difference between stray light and light interfering with stray light represented byΔ=2L(n/cosθ′+tanθ′·sinθ) will amount to not higher than 2% of intensity of interference of interference light with optical path length differenceΔ=0.</p> |
