发明名称 |
Substrate processing system, method of confirmation of its state of use, and method of prevention of illicit use |
摘要 |
<p>[PROBLEM] To enable confirmation of whether a substrate processing system is being illicitly used and preventing that use when there is the fact of illicit use. [MEANS FOR SOLUTION] A license file LF is a file encrypting license information L including usage terms of a substrate processing system for a specific user. A match confirmation program P2 confirms the match between the content of the license file LF decrypted by a decryption program P1 and device information DI, network information NI, and current time CT obtained from the substrate processing system to confirm the existence of the fact of illicit use. If there is illicit use, the control program P3 stops operation of the substrate processing system until predetermined action is taken based on the information from the match confirmation program P2.</p> |
申请公布号 |
EP2688090(B1) |
申请公布日期 |
2015.04.08 |
申请号 |
EP20130185393 |
申请日期 |
2005.08.10 |
申请人 |
NIKON CORPORATION;NIKON SYSTEMS INC. |
发明人 |
SUZUKI, HIROYUKI;OKITA, SHINICHI;YAMAGUCHI, TADASHI |
分类号 |
H01L21/027;G06F21/71 |
主分类号 |
H01L21/027 |
代理机构 |
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代理人 |
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地址 |
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