发明名称 |
SCANNING TRANSMISSION ELECTRON MICROSCOPE AND AXIAL ADJUSTMENT METHOD THEREOF |
摘要 |
<p>An object of the present invention is to provide a scanning transmission electron microscope equipped with an aberration corrector, which is capable of automatically aligning the position of a convergence aperture with the center of an optical axis irrespective of skill and experience of an operator. The invention provides a scanning transmission electron microscope system including: an electron source; a condenser lens configured to converge an electron beam emitted from the electron source; a deflector configured to cause the electron beam to perform scanning on a sample; an aberration correction device configured to correct an aberration of the electron beam; a convergence aperture configured to determine a convergent angle of the electron beam; and a detector configured to detect electrons passing through or diffracted by the sample. The system acquires information on contrast of a Ronchigram formed by the electron beam passing through the sample, and determines a position of the convergence aperture on the basis of the information.</p> |
申请公布号 |
EP2600379(B1) |
申请公布日期 |
2015.04.08 |
申请号 |
EP20110812257 |
申请日期 |
2011.07.11 |
申请人 |
HITACHI HIGH-TECHNOLOGIES CORPORATION |
发明人 |
NAKAMURA, KUNIYASU;INADA, HIROMI |
分类号 |
H01J37/28;H01J37/04;H01J37/09 |
主分类号 |
H01J37/28 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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