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发明名称
半導体装置及びその製造方法
摘要
申请公布号
JP5696367(B2)
申请公布日期
2015.04.08
申请号
JP20100076592
申请日期
2010.03.30
申请人
发明人
分类号
H01L25/065;H01L21/3205;H01L21/60;H01L21/768;H01L23/522;H01L25/07;H01L25/18
主分类号
H01L25/065
代理机构
代理人
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地址
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