发明名称 プラズマ処理方法
摘要 <p>Plasma ignition and cooling methods are described. A method can include providing a dielectric toroidal vessel (1510), at least one ignition electrode (1530) adjacent to the vessel, and a heat sink having multiple segments (1530) urged toward the vessel by a spring-loaded mechanism, and a thermal interface between the vessel and the heat sink. Another method can include providing a gas having a flow rate and a pressure and directing a portion of the flow rate of the gas into a vessel channel (1541-1542). The gas is ignited in the channel while the remaining portion of the flow rate is directed away (1571;1552) from the channel (1541-1542).</p>
申请公布号 JP5695694(B2) 申请公布日期 2015.04.08
申请号 JP20130084553 申请日期 2013.04.15
申请人 发明人
分类号 H05H1/24;H01J37/32 主分类号 H05H1/24
代理机构 代理人
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