发明名称 感光性シロキサン組成物、それから形成された硬化膜および硬化膜を有する素子
摘要 <p>Disclosed is a photosensitive siloxane composition having: (a) a polysiloxane synthesized by reacting at least one organosilane represented by general formula 1, (b) a quinone diazide compound, (c) a solvent, and (d) the silicate compound represented by general formula 2. (In formula 1, R1 represents any of hydrogen, an alkyl group having 1-10 carbon atoms, an alkenyl group having 2-10 carbon atoms, or an aryl group having 6-15 carbon atoms; the plurality of R1 may be the same or different. R2 represents any of hydrogen, an alkyl group having 1-6 carbon atoms, an acyl group having 2-6 carbon atoms, or an aryl group having 6-15 carbon atoms; the plurality of R2 may be the same or different; and n represents an integer from 0 to 3.) (In formula 2, R3 to R6 each independently represents any of hydrogen, an alkyl group having 1-6 carbon atoms, an acyl group having 2-6 carbon atoms; or an aryl group having 6-15 carbon atoms; and p represents an integer from 2 to 10.) Provided is the photosensitive siloxane composition that can yield a cured film having the properties of high heat resistance and high transparency, and of which the chemical resistance is favorable.</p>
申请公布号 JP5696665(B2) 申请公布日期 2015.04.08
申请号 JP20110535336 申请日期 2011.06.02
申请人 发明人
分类号 G03F7/023;C08K5/057;C08K5/07;C08K5/28;C08K5/5415;C08L83/06;G03F7/004;G03F7/022;G03F7/075;H01L21/027 主分类号 G03F7/023
代理机构 代理人
主权项
地址