发明名称 多結晶シリコン棒搬出冶具および多結晶シリコン棒の刈取方法
摘要 Air bags (220A, 220B) are provided respectively at two planes facing each other on the inner circumference surface of a cylindrical member (210). Retrieving polycrystalline silicon rods (11) involves accommodating it inside the cylindrical member (210) of a carrying tool (200), for example, by putting the cylindrical member (210) on the rods (11) from above, and inflating the air bags (220) by gas injection so as to press the sides of the polycrystalline silicon rods (11) from a direction perpendicular to a plane including both pillars of the U-shaped silicon core wire so that the polycrystalline silicon rods (11) are held in place inside the cylindrical member (210). Then, the polycrystalline silicon rods (11) held in place are taken out of the reactor. Even if the polycrystalline silicon rods (11) have cracks, a collapse and the like are avoided as the air bags (220) absorb external impacts or the like.
申请公布号 JP5696063(B2) 申请公布日期 2015.04.08
申请号 JP20120021015 申请日期 2012.02.02
申请人 发明人
分类号 C01B33/035;C01B33/02 主分类号 C01B33/035
代理机构 代理人
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