| 发明名称 | Suspended membrane device | ||
| 摘要 | The present disclosure is directed to a device that includes a substrate and a sensor formed on the substrate. The sensor includes a chamber formed from a plurality of integrated cavities, a membrane above the substrate, the membrane having a plurality of openings, each opening positioned above one of the cavities, and a plurality of diamond shaped anchors positioned between the membrane and the substrate, the anchors positioned between each of the cavities. A center of each opening is also a center of one of the cavities. | ||
| 申请公布号 | US9000542(B2) | 申请公布日期 | 2015.04.07 |
| 申请号 | US201313907708 | 申请日期 | 2013.05.31 |
| 申请人 | STMicroelectronics Pte Ltd. | 发明人 | Loh Tien Choy;Le Neel Olivier |
| 分类号 | H01L27/14;H01L29/84;H01L31/058;B81B3/00;B81C1/00 | 主分类号 | H01L27/14 |
| 代理机构 | Seed IP Law Group PLLC | 代理人 | Seed IP Law Group PLLC |
| 主权项 | 1. A device, comprising: a substrate; a sensor formed on the substrate, the sensor including: a single chamber having a plurality of integrated cavities;a membrane above the substrate, the membrane having a plurality of openings, each opening positioned above one of the cavities; anda plurality of anchors positioned between the membrane and the substrate, the anchors positioned between each of the cavities. | ||
| 地址 | Singapore SG | ||