发明名称 |
Organic thin film transistor and method of manufacturing the same |
摘要 |
According to example embodiments, a method of manufacturing an organic thin film transistor includes sequentially forming a gate electrode, a gate insulator, a source electrode, and a drain electrode on a substrate, forming a first self-assembled monolayer on the source electrode and the drain electrode from a first self-assembled monolayer precursor, forming a second self-assembled monolayer on the gate insulator from a second self-assembled monolayer precursor that is different from the first self-assembled monolayer precursor, and forming an organic semiconductor on the first self-assembled monolayer and the second self-assembled monolayer. The first self-assembled monolayer and the second self-assembled monolayer may be formed simultaneously or sequentially in a single container. An organic thin film transistor may be manufactured according to the method. A display device may include the organic thin film transistor. |
申请公布号 |
US8999748(B2) |
申请公布日期 |
2015.04.07 |
申请号 |
US201213670001 |
申请日期 |
2012.11.06 |
申请人 |
Samsung Electronics Co., Ltd. |
发明人 |
Jung Ji-Young;Kim Joo-Young;Kim Hyeok |
分类号 |
H01L51/40;H01L29/08;H01L51/00;H01L51/05;H01L51/10 |
主分类号 |
H01L51/40 |
代理机构 |
Harness, Dickey & Pierce, P.L.C. |
代理人 |
Harness, Dickey & Pierce, P.L.C. |
主权项 |
1. A method of manufacturing an organic thin film transistor, comprising:
sequentially forming a gate electrode, a gate insulator, and source and drain electrodes on a substrate; forming a first self-assembled monolayer on the source electrode and the drain electrode from a first self-assembled monolayer precursor; forming a second self-assembled monolayer on the gate insulator from a second self-assembled monolayer precursor,
the second self-assembled monolayer precursor being a different material than a material of the first self-assembled monolayer precursor,the forming a first self-assembled monolayer and the forming a second self-assembled monolayer being performed simultaneously or sequentially in a single container; and forming an organic semiconductor on the first self-assembled monolayer and the second self-assembled monolayer. |
地址 |
Gyeonggi-do KR |