发明名称 Organic thin film transistor and method of manufacturing the same
摘要 According to example embodiments, a method of manufacturing an organic thin film transistor includes sequentially forming a gate electrode, a gate insulator, a source electrode, and a drain electrode on a substrate, forming a first self-assembled monolayer on the source electrode and the drain electrode from a first self-assembled monolayer precursor, forming a second self-assembled monolayer on the gate insulator from a second self-assembled monolayer precursor that is different from the first self-assembled monolayer precursor, and forming an organic semiconductor on the first self-assembled monolayer and the second self-assembled monolayer. The first self-assembled monolayer and the second self-assembled monolayer may be formed simultaneously or sequentially in a single container. An organic thin film transistor may be manufactured according to the method. A display device may include the organic thin film transistor.
申请公布号 US8999748(B2) 申请公布日期 2015.04.07
申请号 US201213670001 申请日期 2012.11.06
申请人 Samsung Electronics Co., Ltd. 发明人 Jung Ji-Young;Kim Joo-Young;Kim Hyeok
分类号 H01L51/40;H01L29/08;H01L51/00;H01L51/05;H01L51/10 主分类号 H01L51/40
代理机构 Harness, Dickey & Pierce, P.L.C. 代理人 Harness, Dickey & Pierce, P.L.C.
主权项 1. A method of manufacturing an organic thin film transistor, comprising: sequentially forming a gate electrode, a gate insulator, and source and drain electrodes on a substrate; forming a first self-assembled monolayer on the source electrode and the drain electrode from a first self-assembled monolayer precursor; forming a second self-assembled monolayer on the gate insulator from a second self-assembled monolayer precursor, the second self-assembled monolayer precursor being a different material than a material of the first self-assembled monolayer precursor,the forming a first self-assembled monolayer and the forming a second self-assembled monolayer being performed simultaneously or sequentially in a single container; and forming an organic semiconductor on the first self-assembled monolayer and the second self-assembled monolayer.
地址 Gyeonggi-do KR