| 摘要 |
To provide a processor and a processing method to make the operation to load and unload workpieces to and from a processing chamber more efficient, and improve workpiece processing efficiency.;A processor equipped with a processing chamber 10 wherein a first supply/discharge port and a second supply/discharge port have been provided, characterized by being equipped with a first transport mechanism to perform an operation to supply and discharge workpieces 30 via the aforementioned first supply/discharge port, a second transport mechanism to perform an operation to supply and discharge workpieces 30 via the aforementioned second supply/discharge port, an exchange means to deliver workpieces 30a that have been loaded for processing by the aforementioned first transport mechanism to the aforementioned second transport mechanism, and deliver workpieces 32a that have been loaded for processing by the aforementioned second transport mechanism to the first transport mechanism, and a control unit 22 to drive the aforementioned first transport mechanism and second transport mechanism, and alternately supply unprocessed workpieces from the aforementioned first supply/discharge port and the aforementioned second supply/discharge port to the aforementioned processing chamber for processing. |
| 主权项 |
1. A processor for processing workpieces, comprising:
a processing chamber provided with a first supply/discharge port and a second supply/discharge port, which are each used to load unprocessed workpieces and unload processed workpieces, a first transport means comprising a top and bottom support shelves and configured to perform an operation to load unprocessed workpieces into the processing chamber from one of the top and bottom support shelves, via the first supply/discharge port, and an operation to unload processed workpieces from the processing chamber to other one of the top and bottom support shelves, a second transport means comprising a top and bottom support shelves and configured to perform an operation to load unprocessed workpieces into the processing chamber from one of the top and bottom support shelves, via the second supply/discharge port, and an operation to unload processed workpieces from the processing chamber to other one of the top and bottom support shelves, an exchange means configured to deliver workpieces loaded into the processing chamber by the first transport mechanism to the second transport mechanism, and deliver workpieces loaded into the processing chamber by the second transport mechanism to the first transport mechanism, and a control unit to control the first transport mechanism, second transport mechanism and exchange means, and alternately perform supply/discharge operations for workpieces in the first supply/discharge port and second supply/discharge port. |
