Vertically curved waveguide

摘要

An optical waveguide structure may include an optical waveguide structure located within a semiconductor structure and an optical coupler. The optical coupler may include a metallic structure located within an electrical interconnection region of the semiconductor structure, whereby the metallic structure extends downward in a substantially curved shape from a top surface of the electrical interconnection region and couples to the optical waveguide structure. The optical coupler may further include an optical signal guiding region bounded within the metallic structure, whereby the optical coupler receives an optical signal from the top surface and couples the optical signal to the optical waveguide structure such that the optical signal propagation is substantially vertical at the top surface and substantially horizontal at the optical waveguide structure.

主权项

1. A waveguide structure comprising:
an optical waveguide structure located within a semiconductor structure; and an optical coupler including:
a metallic structure located within an electrical interconnection region of the semiconductor structure, the metallic structure extending downward in a substantially curved shape from a top surface of the electrical interconnection region and coupling to the optical waveguide structure, the metallic structure including a portion of a plurality of metallization layers and a portion of a plurality of via layers, the portion of the plurality of metallization layers interleaved with the portion of the plurality of via layers in a substantially vertically stacked configuration, andan optical signal guiding region bounded within the metallic structure, wherein the optical coupler receives an optical signal from the top surface and couples the optical signal to the optical waveguide structure such that the optical signal propagation is substantially vertical at the top surface and substantially horizontal at the optical waveguide structure.