Process of producing grating for X-ray image pickup apparatus

摘要

A process of producing a grating to be used in an X-ray image pickup apparatus includes the steps of preparing a grating having a plurality of protrusions periodically arranged, curving the grating in the direction in which the plurality of protrusions is arranged, and filling spaces between the protrusions with a metal in a state that the grating is curved.

主权项

1. A process of producing a grating to be used in an X-ray image pickup apparatus, comprising the steps of:
preparing a grating having a plurality of protrusions periodically arranged; and filling spaces between the protrusions with a metal, wherein the step of preparing the grating includes: forming a seed layer on one surface of a Si substrate, and forming the plurality of protrusions on the seed layer by etching the Si substrate to expose the seed layer.