Biological sensor measuring electrochemical and/or electrical and diamond electrode and electronic integrated circuit

摘要

A biological sensor for electrochemical and/or electrical measurement, including at least:
a measurement electrode, able to make electrochemical and/or electrical measurements, and including a part of a doped diamond layer of a substrate comprising a stack including a dielectric layer placed between the doped diamond layer and a semiconductor material layer;an electronic circuit for amplifying and/or processing at least one electrical signal intended to be issued by the measurement electrode, electrically connected to the measurement electrode and made in a portion of the semiconductor material layer.

主权项

1. A biological sensor for at least one of electrochemical and electrical measurements, comprising:
a measurement electrode, able to make the at least one of electrochemical and electrical measurements, and including at least a part of a doped diamond layer of a substrate comprising a stack including at least one dielectric layer placed between the doped diamond layer and a semiconductor material layer; trenches that delimit the measurement electrode from the remainder of the doped diamond layer, the trenches being filled with at least one dielectric material and crossing at least the doped diamond layer; and an electronic circuit for at least one of amplifying and processing at least one electrical signal intended to be issued by the measurement electrode, the electronic circuit being different from the measurement electrode and electrically connected to the measurement electrode and made in a portion of the semiconductor material layer.