发明名称 |
Method for fabricating emitter |
摘要 |
A method for fabricating a sharpened needle-like emitter, the method including: electrolytically polishing an end portion of an electrically conductive emitter material so as to be tapered toward a tip portion thereof; performing a first etching in which the electrolytically polished part of the emitter material is irradiated with a charged-particle beam to form a pyramid-like sharpened part having a vertex including the tip portion; performing a second etching in which the tip portion is further sharpened through field-assisted gas etching, while observing a crystal structure at the tip portion by a field ion microscope and keeping the number of atoms at a leading edge of the tip portion at a predetermined number or less; and heating the emitter material to arrange the atoms at the leading edge of the tip portion of the sharpened part in a pyramid shape. |
申请公布号 |
US8999178(B2) |
申请公布日期 |
2015.04.07 |
申请号 |
US201414278760 |
申请日期 |
2014.05.15 |
申请人 |
Hitachi High-Tech Science Corporation |
发明人 |
Sugiyama Yasuhiko;Aita Kazuo;Aramaki Fumio;Kozakai Tomokazu;Matsuda Osamu;Yasaka Anto |
分类号 |
C25F3/00;H01J27/02;H01J9/02;H01J1/15;H01J1/304;H01J9/04;H01J37/08;H01J37/305;H01J37/26 |
主分类号 |
C25F3/00 |
代理机构 |
Adams & Wilks |
代理人 |
Adams & Wilks |
主权项 |
1. A method for fabricating a sharpened needle-like emitter, the method comprising:
electrolytically polishing an end portion of an electrically conductive emitter material so as to be tapered toward a tip portion thereof; performing a first etching in which the electrolytically polished part of the emitter material is irradiated with a charged-particle beam to form a pyramid-like sharpened part having a vertex including the tip portion; and performing a second etching in which the tip portion of the sharpened part is further sharpened through field-assisted gas etching, while observing a crystal structure at the tip portion of the sharpened part by a field ion microscope and keeping the number of atoms at a leading edge of the tip portion of the sharpened part at a predetermined number or less. |
地址 |
JP |