Thrust generation mechanism, drive device, XY stage and XYZ stage

摘要

A thrust generation mechanism includes magnetic pole teeth which are arranged so as to sandwich and hold permanent magnets disposed on movers, cores which serially connect the magnetic pole teeth which sandwich and hold the magnets, armature winding wires which are collectively wound around the cores, and the movers having the magnets arranged such that the different magnetic poles thereof alternately face the front side and the rear side. The magnetic pole teeth which are arranged so as to sandwich and hold the permanent magnets and the armature iron cores which have cores serially connecting the magnetic pole teeth which hold the magnets are arranged in the longitudinal direction of the movers, and armature iron cores have a common winding wire. A stage is provided with a small-sized lightweight drive device which comprises magnetic pole teeth which are arranged on both sides of each permanent magnet with gaps therebetween, cores which connect the magnetic pole teeth, armatures which have armature winding wires wound around the magnetic pole teeth, and a row of the permanent magnets which is arranged such that the different magnetic poles are arranged alternately. The small-sized lightweight drive device is configured so that the number of the magnetic poles of the armatures is changed according to a thrust pattern required by the drive device.

主权项

1. A thrust generation mechanism that comprises an armature and a mover movable relative to each other, the armature including an armature core and a winding and the mover including a permanent magnet, wherein
the armature core comprises polar teeth of the same size and shape are arranged at respective magnetic polarity sides of the permanent magnet directly opposite each other via a gap, and a core that connects the polar teeth, and the armature includes a plurality of the armature cores and the plurality of the armature cores have a same polarity, wherein the same winding is commonly wound around the plurality of the armature cores, wherein the drive device comprises a plurality of the armature units with the plurality of magnetic poles having a same polarity, and
a number of magnetic poles, and/or a number of turns of the winding, and/or a cross-sectional area of the winding configuring each of the plurality of armature units is different for each armature unit.