Sputtering apparatus

摘要

The present invention provides a sputtering apparatus and a film-forming method capable of forming a magnetic film having a reduced variation in the orientation of the magnetic anisotropy. The sputtering apparatus of the present invention is equipped with a rotatable cathode and a rotatable stage. The stage can have an electrostatic chuck. Moreover, the stage may electrically be connected with a bias power source capable of applying a bias voltage to the stage. Furthermore, the stage may have the electrostatic chuck and electrically be connected with the bias power source.

主权项

1. A sputtering apparatus comprising:
a cathode having a sputtering target-supporting surface, the sputtering target-supporting surface being rotatable about a first rotation axis; a stage having a substrate-supporting surface, the substrate-supporting surface being rotatable about a second rotation axis arranged parallel to the first rotation axis and the substrate-supporting surface; at least one electrode disposed inside the stage; at least one cylinder fixed to the stage, the at least one cylinder being rotatable about the second rotation axis; at least one conductive member that is arranged inside the cylinder, the at least one conductive member being electrically connected with an electric source and the cylinder; a pole disposed rotatable about a third rotation axis that is perpendicular to the second rotation axis; at least one electric power-introducing pole that is disposed inside the pole and is supplied with a voltage to be applied to the electrode; and an electric power-introducing mechanism arranged around the pole, the electric power-introducing mechanism being electrically connected with the pole and in a sliding relation with the pole, wherein the electric power-introducing mechanism and the cylinder are electrically connected with each other, and wherein the electrode and the cylinder are electrically connected with each other so that a voltage from the electric source is introduced into the electrode via the cylinder.