Third metal layer for thin film transistor with reduced defects in liquid crystal display

摘要

A liquid crystal display (LCD) includes an array of pixels over a thin film transistor (TFT) substrate. The TFT substrate includes a TFT that has a first metal layer to form a gate electrode and a second metal layer to form a source electrode and a drain electrode for each pixel. The LCD also includes an organic insulation layer disposed over the TFT substrate, where the organic insulator layer has trenches on a top surface. The LCD further includes a third metal layer disposed over the organic insulation layer in the trenches, the trenches having a trench depth at least equal to the thickness of the third metal layer. The LCD also includes a passivation layer over the third metal layer, and a pixel electrode for each pixel over the passivation layer. The LCD further includes a polymer layer over the pixel electrode, and liquid molecules on the polymer layer.

主权项

1. A method of fabricating a liquid crystal display having a array of pixels, the method comprising:
depositing an organic insulation layer over a thin film transistor (TFT) substrate comprising a plurality of TFTs to control the array of pixels, the TFT substrate comprising a first metal layer to form a gate electrode and a second metal layer to form a source electrode and a drain electrode for each of the plurality of TFTs; forming a plurality of trenches in the organic insulation layer by using a half tone mask; depositing a third metal layer over the organic insulation in the trenches, the trenches being configured to have a trench depth at least equal to a thickness of the third metal layer; disposing a passivation layer over the third metal layer; forming a pixel electrode for each pixel over the passivation layer, the pixel electrode being connected to the drain electrode; disposing a polymer layer over the pixel electrode; and aligning liquid molecules on the polymer layer.