| 发明名称 |
MECHANICAL RESONATING STRUCTURES INCLUDING A TEMPERATURE COMPENSATION STRUCTURE |
| 摘要 |
Mechanical resonating structures are described, as well as related devices and methods. The mechanical resonating structures may have a compensating structure for compensating temperature variations. |
| 申请公布号 |
US2015091412(A1) |
申请公布日期 |
2015.04.02 |
| 申请号 |
US201414565261 |
申请日期 |
2014.12.09 |
| 申请人 |
Sand 9, Inc. |
发明人 |
Chen David M.;Kuypers Jan H.;Gaidarzhy Alexei;Zolfagharkhani Guiti |
| 分类号 |
H03H9/02 |
主分类号 |
H03H9/02 |
| 代理机构 |
|
代理人 |
|
| 主权项 |
1. A mechanical resonating structure, comprising:
an active layer; and a compensating structure coupled to the active layer, wherein the compensating structure comprises first, second and third layers of materials, wherein the first and third layers of materials are formed of silicon oxide and have a stiffness that increases with increasing temperature over a temperature range, and wherein the mechanical resonating structure is configured to support Lamb waves. |
| 地址 |
Cambridge MA US |
