发明名称 FLEXIBLE COMPOSITE, METHOD FOR THE PRODUCTION THEREOF, AND USE THEREOF
摘要 The invention relates to a flexible composite containing a plastic film defining an upper and a lower surface, and at least one dielectric barrier coating against gases and liquids, which coating is directly deposited on at least one of the surfaces by plasma-assisted thermal vapour-deposition and contains an inorganic material for vapour deposition coating. The flexible composite can be used to build flexible circuits or displays and is characterized by high barrier protection against oxygen and water vapour.
申请公布号 WO2015014775(A3) 申请公布日期 2015.04.02
申请号 WO2014EP66141 申请日期 2014.07.28
申请人 EVONIK INDUSTRIES AG;MACK, HELMUT;ALBERT, PHILIPP;BORUP, BJÖRN;SAXENA, ANIL K 发明人 MACK, HELMUT;ALBERT, PHILIPP;BORUP, BJÖRN;SAXENA, ANIL K
分类号 C23C14/32;H01L21/00 主分类号 C23C14/32
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