| 摘要 |
<p>PROBLEM TO BE SOLVED: To provide an Ag alloy film with a small specific resistance value, an excellent optical characteristic, various excellent durability such as salt water resistance, heat resistance and humidity resistance, and small variation of a specific resistance value and an optical characteristic even under an usage environment, an Ag alloy conductive film made of the Ag alloy film, an Ag alloy reflective film, an Ag alloy semitransparent film, and an Ag alloy film forming sputtering target.SOLUTION: The Ag alloy contains 0.10 atomic % or more and 1.00 atomic % or less Pd, 0.10 atomic % or more and 1.00 atomic % or less Mg, and residual of Ag and inevitable impurities. Or, the Ag alloy contains 0.10 atomic % or more and 1.00 atomic % or less Pd, 0.05 atomic % or more 1.00 atomic % or less Mg, 0.01 atomic % or more and 0.15 atomic % or less Ca, and residual of Ag and inevitable impurities.</p> |
