INTERFERENCE FILTER, OPTICAL FILTER DEVICE, OPTICAL MODULE, AND ELECTRONIC APPARATUS

摘要

A variable wavelength interference filter includes a stationary substrate, a stationary reflecting film disposed on the entire surface of the stationary substrate opposed to a movable substrate, and formed of a multilayer film, a movable reflecting film opposed to the stationary reflecting film, and a first mirror electrode disposed on the stationary reflecting film.

主权项

1. An interference filter comprising:
a substrate; a first reflecting film disposed on one surface of the substrate, the first reflecting film being formed of a plurality of layers; a second reflecting film opposed to the substrate; and an electrode disposed on the first reflecting film, wherein the first reflecting film includes a first region facing the second reflecting film, and a second region in an area extending from the first region to an outer circumferential edge of the substrate.