发明名称 |
SELF-ALIGNED VIAS FORMED USING SACRIFICIAL METAL CAPS |
摘要 |
A method including forming a sacrificial metal cap on a metal line formed in a first dielectric layer; forming a second dielectric layer on the first dielectric layer; removing the sacrificial metal cap selective to the second dielectric layer and metal line to form a cap opening; forming a dielectric cap in the cap opening and on the metal line; forming an interconnect dielectric layer over the dielectric cap and the second dielectric layer; forming an interconnect opening in the interconnect dielectric layer; removing a portion of the dielectric cap exposed by the interconnect opening selective to the interconnect dielectric layer, the second dielectric layer, and the metal line; and forming an interconnect structure in the interconnect opening, the interconnect structure comprising a contact line above a via, the via having an upper via portion with angled sidewalls and a lower via portion with substantially vertical sidewalls. |
申请公布号 |
US2015091181(A1) |
申请公布日期 |
2015.04.02 |
申请号 |
US201314041187 |
申请日期 |
2013.09.30 |
申请人 |
International Business Machines Corporation |
发明人 |
Li Juntao;Yang Chih-Chao;Yin Yunpeng |
分类号 |
H01L21/768;H01L23/48 |
主分类号 |
H01L21/768 |
代理机构 |
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代理人 |
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主权项 |
1. A method comprising:
forming a sacrificial metal cap on a metal line formed in a first dielectric layer; forming a second dielectric layer on the first dielectric layer, the second dielectric layer being adjacent to and contacting a sidewall of the sacrificial metal cap; removing the sacrificial metal cap selective to the second dielectric layer and metal line to form a cap opening, the cap opening having substantially the same width as the metal line; forming a dielectric cap in the cap opening and on the metal line; and forming an interconnect dielectric layer over the dielectric cap and the second dielectric layer. |
地址 |
Armonk NY US |