| 摘要 |
<p>PROBLEM TO BE SOLVED: To provide an X-ray mask structure and a manufacturing method therefor, having high accuracy and rigidity.SOLUTION: The X-ray mask structure includes: a support substrate 11 having at least one thin-formed part 21 integrally molded and surrounded by a wall part 25; an upper layer 15B which is disposed on the at least one thin-formed part 21 of the support substrate 11, and forms a laminate film 27 together with the at least one thin-formed part 21; and a plurality of X-ray absorption patterns 35 disposed on the upper layer 15B upward of the at least one thin-formed port 21. The at least one thin-formed part 21 and the wall part 25 provide the upper layer 15B with mechanical support, whereas the laminate film 27 provides the plurality of X-ray absorption patterns 35 with mechanical support.</p> |
