| 发明名称 |
ARYL ACETATE ONIUM MATERIALS |
| 摘要 |
Acid generators comprising a carbocyclic aryl or heteroaromatic group substituted with at least one acetate moiety are provided. These acid generators are particularly useful as a photoresist composition component. |
| 申请公布号 |
US2015093709(A1) |
申请公布日期 |
2015.04.02 |
| 申请号 |
US201314040594 |
申请日期 |
2013.09.27 |
| 申请人 |
Rohm and Haas Electronic Materials LLC |
发明人 |
LaBEAUME Paul J. |
| 分类号 |
G03F7/027;G03F7/30;C07D335/16;C07D409/12;C07D333/76;C07C323/62 |
主分类号 |
G03F7/027 |
| 代理机构 |
|
代理人 |
|
| 主权项 |
1. An acid generator that comprises a structure of Formula (I): wherein:
Z is a counter anion;X is sulfur or iodine;R is hydrogen or a non-hydrogen substituent;R′ and R″ are the same or different non-hydrogen substituents, and optionally may form a ring, provided that if X is iodine, one of R′ and R″ is absent; andA is an optionally substituted carbocyclic aryl or optionally substituted heteroaromatic group. |
| 地址 |
Marlborough MA US |
