发明名称 SEMICONDUCTOR DEVICE AND DIELECTRIC FILM
摘要 The semiconductor device of the embodiment is provided with a first conducting layer, a second conducting layer, and, between the first conducting layer and the second conducting layer, a dielectric film containing a fluorite crystal, wherein positive ion sites contain at least any one of Hf (hafnium) or Zr (zirconium) and negative ion sites contain O (oxygen), and, a, b and c fulfill a predetermined relationship, when, among the three axes of the primitive unit cell of the crystal, the axis in the direction with no inversion symmetry is the c-axis, the layering direction of two species of atom planes formed by negative ions in different arrangement positions is the a-axis, and the remainder is the b-axis, a is the axis length of the a-axis of the primitive unit cell, b is the axis length of the b-axis, and c is the axis length of the c-axis, p is a parameter, and x, y, z, u, v and w are values represented using the parameter p.
申请公布号 WO2015045592(A1) 申请公布日期 2015.04.02
申请号 WO2014JP69368 申请日期 2014.07.22
申请人 KABUSHIKI KAISHA TOSHIBA 发明人 INO, TSUNEHIRO;TAKAISHI, RIICHIRO;KATO, KOICHI;NAKASAKI, YASUSHI;ISHIHARA, TAKAMITSU;MATSUSHITA, DAISUKE
分类号 H01L21/8246;C01G27/02;H01L27/105 主分类号 H01L21/8246
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