PRETREATMENT METHOD FOR FILTER UNIT, TREATMENT LIQUID SUPPLY DEVICE, FILTER UNIT HEATING DEVICE, AND PRETREATMENT METHOD FOR TREATMENT LIQUID SUPPLY PATH

摘要

One embodiment of this method includes a step wherein, after a new filter unit (3) has been attached to a treatment liquid supply device and before a treatment liquid containing a solvent is circulated, the filter unit is immersed in the solvent used for pretreatment, after which the solvent is drained away. The solubility of the constituent material of a filter part (31) in the filter unit with respect to this solvent is higher than the solubility of this constituent material with respect to the treatment liquid. This step makes it possible to remove components which can dissolve into the treatment liquid from the filter part and become contaminants (particles), before the treatment liquid is circulated through the filter unit.