METHOD FOR PRODUCING METAL OXIDE FILM, METAL OXIDE FILM, THIN-FILM TRANSISTOR, DISPLAY DEVICE, IMAGE SENSOR, AND X-RAY SENSOR

摘要

The present invention provides a method for producing a metal oxide film which includes: a step for coating a substrate with a solution containing a metal nitrate, and forming a metal oxide precursor film by drying the film coat; and a step for changing the metal oxide precursor film into a metal oxide film by irradiating the metal oxide precursor film with ultraviolet light containing two or more peak components for which the intensity of illumination is 10mW/cm2 or higher in a wavelength band at or below 300nm. The present invention further provides a metal oxide film produced by this method, and a device provided with the same.