发明名称 |
TRANSFER CHAMBER GAS PURGE APPARATUS, ELECTRONIC DEVICE PROCESSING SYSTEMS, AND PURGE METHODS |
摘要 |
Transfer chamber gas purge apparatus are disclosed. The transfer chamber gas purge apparatus has a transfer chamber adapted to contain at least a portion of a transfer robot, the transfer chamber including side walls, a chamber lid, and a chamber floor, wherein the chamber lid has a plurality of distributed chamber inlets. The plurality of distributed chamber inlets may include diffusing elements. Laminar purge gas flow may be provided above the substrate. Systems and methods including a plurality of distributed chamber inlets are disclosed, as are numerous other aspects. |
申请公布号 |
WO2015048470(A1) |
申请公布日期 |
2015.04.02 |
申请号 |
WO2014US57753 |
申请日期 |
2014.09.26 |
申请人 |
APPLIED MATERIALS, INC |
发明人 |
NG, EDWARD;ENGLHARDT, ERIC, A.;MOREY, TRAVIS;MAJUMDAR, AYAN;HONGKHAM, STEVE, S. |
分类号 |
H01L21/02;H01L21/302;H01L21/677 |
主分类号 |
H01L21/02 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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