| 摘要 |
<p>A piezoelectric actuator (21a) is configured by sequentially laminating, on a substrate (22), a lower electrode (24) that serves as a first electrode, a piezoelectric thin film (25) and an upper electrode (26) that serves as a second electrode in this order. With respect to the piezoelectric thin film (25), more oxygen defects in crystals are present in a region on the side of the interface with the first electrode than in a region on the side of the interface with the second electrode. The polarization direction of the piezoelectric thin film (25) is the direction from the second electrode toward the first electrode.</p> |
