| 摘要 |
<p>PROBLEM TO BE SOLVED: To provide a contactor capable of achieving a state in which a movable member (or another member attached to the movable member) is brought into contact with an object with zero pressure.SOLUTION: A contact head 11 provided on a contactor 1 includes a contact rod 21, a housing 22, a thrust air passage 32, and a cancel air passage 33. The housing 22 supports the contact rod 21 by a static pressure air bearing so as to be linearly movable, and thereby the contact rod 21 can be brought into contact with an object 3. When compressed-air is fed into the thrust air passage 32, a force in a direction approaching to the object 3 is applied to the contact rod 21, and when the compressed-air is fed into the cancel air passage 33, a force in the opposite direction is applied to the contact rod 21. A control part 12 controls the pressure of the compressed-air of the thrust air passage 32 and the pressure of the compressed-air of the cancel air passage 33 in a state in which the contact rod 21 is in contact with the object 3, to make the pressure applied to the object 3 zero.</p> |
